Choice of structural elements of micromechanical autooscillating inertial sensors

Аuthors

Tirtichny A. A.

Saint Petersburg State University of Aerospace Instrumentation, 67, Bolshaya Morskaya str., Saint Petersburg, 190000, Russia

Abstract

There’re basic principles of micromechanical autooscillating inertial sensors’ designing in this paper. Methods of analysis of optoelectronic position sensor’s parameters are developed. Advantages of electromagnetic drivers are examined. It’s established that application of the micromechanical autooscillating inertial sensors simultaneously allows engineers to achieve both increasing of sensitivity and rising of measurements precision.

Keywords:

autooscillations; inertial sensor; micromechanics; optoelectronic position sensor; magnetoelectric, electromagnetic and electrostatic drivers

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