Microoptoelectromechanical systems for measuring the motion parameters of unmanned aerial vehicles in a three-dimensional basis

Аuthors

Zheglov M. A.

State Research Institute Engineeringpace University, 125, Mira prospect, Moscow, 129226, Russia

e-mail: majeglov@mail.ru

Abstract

The paper deals with the construction of microoptoelectromechanical systems for measuring three projections of angular velocity and three projections of linear acceleration using a single vibration sensing structure. By measuring the motion signal of the SS and selecting from the measured signal slow-changing signals in the bandwidth of less than 500 Hz, proportional to linear acceleration, and fast-changing signals in the bandwidth of more than 5 kHz, proportional to the angular velocity, amplitude and frequency of primary vibrations, linear acceleration and angular velocity can be measured.
To measure the motion parameters of an object in a three-dimensional basis, it is necessary to use a vibration SS with several degrees of freedom, for example: ring, beam and four-mass. The mechanooptical modulators based on a Fabry-Perot interferometer or optical tunnel effect are measured movement and deformation of the SS in twelve directions. Using the frequency division of the displacement signal, slowly changing signals proportional to linear acceleration and rapidly changing signals proportional to angular velocity are distinguished. By combining the information received from MOMs, three projections of angular velocity and three projections of linear acceleration are calculated.
The measurement ranges of angular velocity in the range of ±250 deg/s and linear acceleration in the range of ±100 m/s2 allows you to measure the movement parameters of a large number of types of unmanned aerial vehicles (UAVs). The use of microelectronics technologies in the production of MOEMS allows us to provide a cost comparable to the cost of microelectromechanical systems, which is important for building promising UAVs. The combination of these two factors provides the construction of inertial control systems for advanced UAVs designed to solve a wide range of tasks based on the MOEMS measurement of motion parameters in a three-dimensional basis.

Keywords:

microoptoelectromechanical; inertial; systems; transducer; sensor; angular velocity; acceleration; mechanooptical; modulator

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